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Thermal Mass Flow, Digital, Elastomer Seal

Polycontrols carry an extensive inventory of Brooks Instrument replacement parts and 20 different ranges of smart mass flow controllers, ready to be shipped t o ensure a fast turnaround service and prevent costly downtime.



model 5850S model 5851S model 5853S

 Smart Gas Mass Flow with Elastomer Seal

 

 

Full Scale

 

Max Pressure**

Max Temp

Input/

Type

Model

Capacity *

Accuracy

bar

psig

C

F

Output


Mass Flow Controller

 

5850S
5851S
5853S

 

N2 equivalent

10 sccm
25 sccm
50 sccm
100 sccm
250 sccm
500 sccm
750 sccm
1.0 slpm
2.5 slpm
5.0 slpm
10.0 slpm
25.0 slpm
50.0 slpm
100 slpm
200 slpm
300 slpm
500 slpm
1000 slpm
1500 slpm
2000 slpm

0.7% Rate
& 0.2% FS

100

1500

65

150

0-5 Vdc 4-20mA
RS-232
RS- 485
   

* Nitrogen equivalent flows at standard temperature and pressure. (Standard: 0º C and 101 kPa (760 Torr).
* Available with calibration to other reference conditions, specify at time of ordering.


Rotameters

Brooks Instrument also carries a large inventory of rotameters. These units are ready to be shipped within 48 hours from Hatfield, Pennsylvania.

All units are SS 316 with glass tube.


model 1350E model 1355E

 Rotameters

 

 

Full Scale

 

Max Pressure**

Max Temp

Type

Model

Capacity *

Accuracy

Bar

psig

C

F


Purgemeters

 

1350E

 

Air
equivalent

0.13 scfh
0.18 scfh
0.34 scfh
0.70 scfh
1.3 scfh
2.0 scfh
3.0 scfh
5.0 scfh
7.5 scfh
12 scfh
17 scfh
26 scfh
38 scfh
44 scfh
60 scfh
85 scfh
140 scfh

H2O
Equivalent

0.011 gph
0.022 gph
0.046 gph
0.11 gph
0.25 gph
0.38 gph
0.65 gph
0.95 gph
1.6 gph
2.6 gph
3.4 gph
5.5 gph
8.0 gph
9.0 gph
12.0 gph
19.0 gph
30.0 gph

10%

14

200

1 to 121

33 to 250


Purgemeters

 

 

1355E

 

 


Air
equivalent


47.1 sccm
73.3 sccm
140 sccm
260 sccm
491 sccm
790 sccm
1250 sccm
0.79 slpm
1.04 slpm
1.6 slpm
2.32 slpm
2.25 slpm
2.92 slpm
4.42 slpm
6.35 slpm
6.74 slpm
3.69 slpm
7.23 slpm
10.1 slpm
10.6 slpm
15.7 slpm
22.0 slpm
22.6 slpm
28.6 slpm
41.6 slpm
61.4 slpm


H2O
Equivalent

0.524 cc/min
1.02 cc/min
2.42 cc/min
5.31 cc/min
10.2 cc/min
16.1 cc/min
19.8 cc/min
34.4 cc/min
44.2 cc/min
50.6 cc/min
67.7 cc/min
76.2 cc/min
81.1 cc/min
127 cc/min
189 cc/min
202 cc/min
208 cc/min
284 cc/min
312 cc/min
333 cc/min
468 cc/min
548 cc/min
690 cc/min
809 cc/min
1290 cc/min
1960 cc/min

5%

14

200

1 to 121

33 to 250

* Nitrogen equivalent flows at standard temperature and pressure. (Standard: 0º C and 101 kPa (760 Torr).
* Available with calibration to other reference conditions, specify at time of ordering.

 
 
   
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