Flow Meter
PRODUCT
NEWS  

Application Notes

Semiconductor

Informations

Flow Measurement for Semiconductor

Brooks offers powerful liquid vaporization solutions that permit flexible operation and repeatable delivery of liquid precursors. These systems feature Brooks gas and liquid flow controllers plus unique direct liquid injection vaporization modules that ensure complete vaporization, low transit times, and quick startup and shutdown. The vaporizer solutions are engineered using a modular design to support a wide range of process fluids and operating conditions.

urlPhysical Vapor Deposition

urlChemical Vapor Deposition, including MOCVD

urlTransparent Conducting Oxides

urlPolysilicon and Crystal Pulling

urlSpray Coatings

faq
Questions icon Enquiries, Comments & Questions Phone icon Contact Us About icon About Us