Flow Meters & Flow Controllers

brooks

GF100 Series Thermal Mass Flow Meters & Flow Controllers - Brooks Instrument

TMF-GF125-200Designed for semiconductor, MOCVD and other gas flow control applications that require a high-purity, all-metal flow path, the Brooks GF100 Series mass flow controllers deliver outstanding performance, reliability and flexibility. The GF100 Series has been marathon-tested to over three times the semiconductor industry standard for reliability, ensuring repeatable low-drift performance over time.

  • Ultra-fast 300-millisecond settling time
  • Optional pressure transient insensitive (PTI), high accuracy and safe delivery system models available
  • MultiFlo™ gas and range configurability
  • Corrosion-resistant Hastelloy® sensor tube and valve orifice (jet)

Flow-Control-2011-Innovation-Award-Logo

GF40/80 Series Thermal Mass Flow Meters & Flow Controllers

Designed for solar thin film deposition, CVD, vacuum processes, bioreactors and other industrial gas flow control applications that require cost-efficient solutions.

The GF40/80 Series is the perfect choice for customers who use thermal mass flow controllers or flow meters on a variety of gases, who need to change gas type frequently or need to re-range while preserving gas measurement and control accuracy.

  • Elastomer or metal seal
  • Fast sub 1 second settling time
  • MultiFlo gas and range configurability
  • Corrosion-resistant Hastelloy sensor tube

Specification & Documentation

MultiFlo Capable Thermal Mass Flow Controllers & Flow Meters

        Max Pressure Max Temp  
Model Type Full Scale Capacity Accuracy Bar Psig C F Input/Output

TMF-GF125-200

GF100
High Purity PTI Metal Seal Mass Flow Controller or Flow Meter 3 sccm -
55 slpm
>N2 equivalent
±1% rate
(35-100% FS)
33 485 50 122 0 - 5 Vdc / RS485 / DeviceNet™

TMF-GF125-200

GF120
Ultra-High Purity Metal Seal Mass Flow Controller or Flow Meter 3 sccm -
55 slpm
>N2 equivalent
±1% rate
(35-100% FS)
33 485 50 122 0 - 5 Vdc / RS485 / DeviceNet™

TMF-GF125-200

GF125
Ultra-High Purity PTI Metal Seal Mass Flow Controller 3 sccm -
55 slpm
>N2 equivalent
±1% rate
(35-100% FS)
6 85 50 122 0 - 5 Vdc / RS485 / DeviceNet™

TMF-GF125-200

GF125 (HA)
Ultra-High Purity High-Accuracy Metal Seal
Mass Flow Controller or Flow Meter
5 sccm -
10 slpm
>N2 equivalent
±1% rate
(10-100% FS)
6 85 50 122 0 - 5 Vdc / RS485 / DeviceNet™

TMF-GF125-200

GF120 (SDS)
Safe Delivery System
Ultra-High Purity Safe Delivery Metal Seal Mass Flow Controller 4 sccm - 1 slpm ±1% rate
(35-100% FS)
33 485 50 122 0 - 5 Vdc / RS485 / DeviceNet™

GF80

GF80
Metal Seal Mass Flow Controller or Flow Meter 3 sccm - 30 slpm ±1% rate
(35-100% FS)
10 150 65 150 0-5 Vdc / 4-20 mA / Profibus / RS485 / DeviceNet™

GF40

GF40
Elastomer Seal Mass Flow Controller or Flow Meter 3 sccm - 30 slpm ±1% rate
(35-100% FS)
10 150 65 150 0-5 Vdc / 4-20 mA / Profibus / RS485 / DeviceNet™