Flow Meters & Flow Controllers

Digital - Metal-Sealed - Gas Service

Brooks offers three series of mass flow controllers / mass flow meters for applications requiring high leak integrity and/or ultra-high purity (UHP). These devices are designed with a 1.125” wide profile providing an efficient, space-saving footprint.

The GF Series is our newest addition to this product line. GF Series is a robust upgrade for standard high purity (HP) mass flow controllers, offering improved accuracy and cleanliness. Optional electrical adapters ensure drop in compatibility with older style analog flow controllers. Brooks’ new sensor technology with improved signal to noise performance and powerful control algorithms deliver enhanced measurement accuracy and reproducibility for optimal gas chemistry control.

TMF-SLA7950The SLA7900 Series has been the workhorse of the industry for several years. Both the GF Series and the SLA7900 Series feature an all-metal flow path, electropolished to better than five micro-inch Ra. For customers who do not require an electropolished flow path, the all-metal SLA7800 Series is the ideal choice.

Additional features include:

• New Coplanar Valve offers improved performance to deliver fast, accurate and reliable response across a wide and varying range of differential pressures
• Proprietary valve control algorithm enhances response time
• High leak integrity, UHP, and metal seal options ensure clean flow paths for contamination sensitive processes
• Available with traditional analog or digital I/O