A wide selection of Brooks Instruments flow meters and mass flow controllers are available to meet all your flow metering needs. Brooks Instruments offers support for various applications, and the widest range of options in the industry. Accuracy, repeatability, auto-diagnosis, and flexibility guarantee instrument efficiency and quality. Various classified environment ratings are offered.
Thermal Mass Flow (TMF) technology uses thermodynamic principles to drive actual mass flow. A thermal mass flow sensor can be combined with an integral valve and PID flow controller in one compact, efficient instrument that can accurately control the flow of gases and liquids over a wide range of flow rates. Thermal mass flow products exhibit high repeatability and accuracy, providing an effective way to ensure a reliable and stable process.
Brooks offers a broad range of thermal mass flow controllers and mass flow meters, ensuring that we will have exactly the right device for your application. Brooks thermal mass flow devices provide significant advantages in response time, accuracy, repeatability, turndown, self-diagnostics and application flexibility. The Brooks portfolio covers the widest range of options to meet your application needs.
Theory of operation:
Thermal mass flow meters use combinations of heated elements and temperature sensors to measure the difference between static and flowing heat transfer to a fluid. The fluid temperature is also measured and compensated for. If the density and specific heat characteristics of the fluid are constant, the meter can provide a direct mass flow readout, and does not need any additional pressure temperature compensation over their specified range.
Thermal mass flow meter (also called thermal dispersion or thermal displacement flowmeter) technology is used for compressed air, nitrogen, helium, argon, oxygen, and natural gas. In fact, most gases can be measured as long as they are fairly clean and non-corrosive. For more aggressive gases, the meter may be made out of special alloys (e.g. Hastelloy), and pre-drying the gas also helps to minimize corrosion.
Today, thermal mass flow meters are used to measure the flow of gases in a growing range of applications, such as chemical reactions or thermal transfer applications that are difficult for other flow metering technologies. This is because thermal mass flow meters monitor variations in one or more of the thermal characteristics (temperature, thermal conductivity, and/or specific heat) of gaseous media to define the mass flow rate.